Scalable Aluminum-Doped Zinc Oxide Transparent Electrodes via Spatial ALD for High-Efficiency Perovskite Modules

Area of Science:

• Materials Science
• Renewable Energy
• Nanotechnology

Background:

• Perovskite solar module commercialization is hindered by expensive and scarce indium-based transparent electrodes.
• Developing cost-effective, high-performance alternatives is crucial for large-area applications.

Purpose of the Study:

• To engineer a scalable, high-performance transparent electrode using aluminum-doped zinc oxide (AZO).
• To optimize AZO conductivity and transmittance for perovskite solar modules via precise dopant control.

Main Methods:

• Fabrication of AZO thin films using spatial Atomic Layer Deposition (ALD).
• Tuning aluminum (Al) doping levels (2.4%-4.2%) by controlling the Al:Zn cycle ratio.
• Characterization of electrical properties, optical transmittance, and haze.
• Assessment of uniformity and performance in large-area perovskite solar modules.

Main Results:

• Achieved record electrical performance with a sheet resistance of 3.3 Ω sq^-1, surpassing commercial ITO (5.8 Ω Ω sq^-1).
• Maintained high optical transmittance (90%) and controlled haze (55%).
• Demonstrated uniform deposition over 900 cm² substrates with minimal thickness and sheet resistance variation.
• Enabled a record 18.50% efficiency in large-area perovskite solar modules.

Conclusions:

• Precise atomic-level dopant regulation in AZO is key to optimizing conductivity.
• Spatial ALD provides a manufacturing-compatible route for producing uniform, high-performance, indium-free transparent electrodes.
• This advancement facilitates the cost-effective commercialization of large-area perovskite solar modules.