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The Modular Design and Production of an Intelligent Robot Based on a Closed-Loop Control Strategy

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Prescribed-time prescribed-performance event-triggered control algorithm for wafer transfer robots.

Bo Xu¹, Hao Yu², Luyao Yuan¹

¹Department of Electrical and Mechanical, Beijing Information Science and Technology University, Haidian, 100192, Beijing, China.

Scientific Reports

|April 18, 2026

Summary

This summary is machine-generated.

This study introduces a novel control algorithm for wafer transfer robots, enhancing precision and response time. The new method significantly reduces control updates, improving efficiency in semiconductor manufacturing.

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Area of Science:

Robotics
Control Systems Engineering
Semiconductor Manufacturing

Background:

Wafer transfer robots are critical in semiconductor manufacturing, requiring high dynamic performance.
Existing control algorithms struggle to balance stability, precision, and rapid response.
High-speed operations demand advanced control for optimal robotic motion.

Purpose of the Study:

To develop an advanced control algorithm for wafer transfer robots.
To address limitations in existing methods for robotic motion control.
To improve stability, precision, and response time in semiconductor handling.

Main Methods:

Prescribed-time prescribed-performance control algorithm.
Extended state observer for unmodeled dynamics and disturbance compensation.
Event-triggered mechanism to reduce control signal updates.

Main Results:

Guaranteed uniform ultimate boundedness of the closed-loop system.
Joint position errors converge within 0.0009 rad by prescribed times.
Overshoot limited to 1.2%, communication load reduced by over 64.6%.

Conclusions:

The proposed algorithm ensures deterministic transient response for wafer transfer robots.
It significantly enhances disturbance rejection and communication efficiency.
This method overcomes limitations in balancing robotic motion control requirements.