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Selective laser-induced etching process-enabled double-cavity glass MEMS hydrogen sensor at room-temperature

Ji Young Park1,2, Byungkwon Jang2,3, Jun Young Kim2

  • 1Department of Semiconductor Materials Engineering, Sun Moon University, Asan, Republic of Korea.

Microsystems & Nanoengineering
|April 21, 2026
PubMed
Summary

This study presents a novel glass MEMS hydrogen sensor using nitrogen-doped carbon spheres and a platinum catalyst. It achieves a tenfold sensitivity increase at room temperature for reliable microsystem applications.

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Area of Science:

  • Materials Science
  • Microelectromechanical Systems (MEMS)
  • Chemical Sensing

Background:

  • Hydrogen sensors are crucial for safety and energy applications.
  • Existing sensors often face limitations in sensitivity, operating temperature, and scalability.
  • MEMS technology offers miniaturization and integration potential for sensor development.

Purpose of the Study:

  • To develop a high-performance, room-temperature hydrogen sensor using a novel glass-based MEMS platform.
  • To enhance sensor sensitivity and thermal stability through innovative cavity engineering and catalyst design.
  • To establish a scalable and cost-effective manufacturing process for microsystem hydrogen sensing.

Main Methods:

  • Fabrication of a single glass wafer with high-aspect-ratio vias and double cavities using laser-induced selective wet etching.
  • Integration of a suspended sensing membrane with platinum interdigital electrodes and platinum/nitrogen-doped carbon sphere (NCS) catalyst islands.
  • Utilizing pyridinic/pyrrolic nitrogen sites on NCS to promote H2 dissociation and spillover for chemiresistive transduction.
  • Employing finite-element simulations and infrared thermography to analyze thermal performance.

Main Results:

  • The glass-based MEMS sensor demonstrated enhanced thermal stability, maintaining the sensing region ~10°C higher than planar devices.
  • A significant, order-of-magnitude (~10 times) increase in sensitivity at room temperature was achieved.
  • The nitrogen-doped carbon spheres (NCS) with platinum catalyst effectively facilitated hydrogen dissociation and spillover.
  • The simplified, bonding-free single glass wafer process proved scalable and economical.

Conclusions:

  • The developed glass-based MEMS hydrogen sensor offers a high-performance, room-temperature sensing solution.
  • The combination of cavity engineering and Pt/NCS catalyst significantly boosts sensor sensitivity and thermal management.
  • This platform provides a scalable, economical, and reliable foundation for advanced microsystem hydrogen sensing applications.