Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Experiment Video

Updated: Apr 25, 2026

A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
09:03

A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

Published on: January 7, 2019

6.5K

Fabry-Perot cascade interferometer for temperature measurement of Si microstructures.

Didier Beghuin, John Bigeon, Maria Lopera-Acosta

    Applied Optics
    |April 24, 2026
    PubMed
    Summary

    Accurately measuring MEMS micromirror temperature is crucial. A novel optical technique using coherence-tuned Fabry-Perot interferometry provides precise, non-contact temperature validation for silicon microelectromechanical systems.

    Related Concept Videos

    You might also read

    Related Articles

    Articles linked to this work by shared authors, journal, and citation graph.

    Sort by
    Same author

    Switchable Two-Dimensional Waveguiding Abilities of Luminescent Hybrid Nanocomposites for Active Solar Concentrators.

    ACS applied materials & interfaces·2020
    Same author

    NOMAD spectrometer on the ExoMars trace gas orbiter mission: part 2-design, manufacturing, and testing of the ultraviolet and visible channel.

    Applied optics·2017
    Same author

    Invited review article: Advanced light microscopy for biological space research.

    The Review of scientific instruments·2014
    Same author

    Injection and waveguiding properties in SU8 nanotubes for sub-wavelength regime propagation and nanophotonics integration.

    Nanoscale·2014
    Same author

    Optical deflection tomography with the phase-shifting schlieren.

    Optics letters·2010
    Same author

    Polarization imaging by use of digital holography.

    Applied optics·2002

    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Microelectromechanical Systems (MEMS)

    Background:

    • Silicon MEMS micromirrors require accurate temperature validation under high optical loads.
    • Traditional thermal modeling faces parameter uncertainties, and non-contact methods struggle with thin silicon structures.

    Purpose of the Study:

    • To develop and validate a novel optical technique for precise temperature measurement of MEMS micromirror plates.
    • To overcome limitations of existing thermal modeling and measurement methods for MEMS devices.

    Main Methods:

    • Utilized coherence-tuned Fabry-Perot interferometry with two sequential interferometers and an incoherent source.
    • Isolating the temperature-dependent refractive index change in the mirror plate by excluding substrate reflections.

    More Related Videos

    Fabrication and Testing of Photonic Thermometers
    08:44

    Fabrication and Testing of Photonic Thermometers

    Published on: October 24, 2018

    5.4K
    Implementation of a Reference Interferometer for Nanodetection
    16:11

    Implementation of a Reference Interferometer for Nanodetection

    Published on: April 26, 2014

    8.8K

    Related Experiment Videos

    Last Updated: Apr 25, 2026

    A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
    09:03

    A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

    Published on: January 7, 2019

    6.5K
    Fabrication and Testing of Photonic Thermometers
    08:44

    Fabrication and Testing of Photonic Thermometers

    Published on: October 24, 2018

    5.4K
    Implementation of a Reference Interferometer for Nanodetection
    16:11

    Implementation of a Reference Interferometer for Nanodetection

    Published on: April 26, 2014

    8.8K

    Main Results:

    • Achieved temperature uncertainty of ±2°C over a 40°C-200°C range when calibrated.
    • Demonstrated a novel, non-contact method for thermal characterization of MEMS devices.

    Conclusions:

    • The developed optical technique enables accurate thermal characterization of MEMS micromirrors.
    • This method is suitable for MEMS devices where conventional contact-based measurements are impractical.