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Updated: Apr 28, 2026

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

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Impedance-Matched High-Overtone Thickness-Shear Bulk Acoustic Resonators With Scalable Mode Volume

Zi-Dong Zhang1,2, Zhen-Hui Qin1, Yi-Han He1

  • 1State Key Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing, China.

Advanced Science (Weinheim, Baden-Wurttemberg, Germany)
|April 27, 2026
PubMed
Abstract

Keywords:
high‐overtone bulk acoustic resonatorsimpedance‐matchedlithium niobatemicrowave signal processingthickness‐shear‐mode

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