Atomic Step-Terrace Ordering Enables Unprecedentedly Low Pop-in Stress Scatter in GaN (0001)

Hiroto Oguri1, Yan Li1, Ai I Osaka2

  • 1Department of Mechanical Science and Bioengineering, The University of Osaka, Toyonaka, Osaka, Japan.

Summary

Achieving atomic-level GaN surfaces with catalyst-referred etching (CARE) enabled precise nanoindentation testing. This breakthrough revealed atomic step-terrace structure as critical for predictable crystal plasticity initiation.

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