Atomic Step-Terrace Ordering Enables Unprecedentedly Low Pop-in Stress Scatter in GaN (0001)
Hiroto Oguri1, Yan Li1, Ai I Osaka2
1Department of Mechanical Science and Bioengineering, The University of Osaka, Toyonaka, Osaka, Japan.
Small (Weinheim an Der Bergstrasse, Germany)
|April 27, 2026
Summary
Achieving atomic-level GaN surfaces with catalyst-referred etching (CARE) enabled precise nanoindentation testing. This breakthrough revealed atomic step-terrace structure as critical for predictable crystal plasticity initiation.
Area of Science:
- Materials Science
- Nanotechnology
- Solid Mechanics
Background:
- Atomic-level surface features significantly influence crystal plasticity at the nanoscale.
- Controlling surface atomic arrangements is challenging, especially for difficult-to-process materials like Gallium Nitride (GaN).
- Previous nanoindentation studies were limited by surface preparation techniques and reproducibility.
Purpose of the Study:
- To create ideal step-terrace Gallium Nitride (GaN) surfaces approaching atomic flatness.
- To investigate the impact of controlled atomic-scale surface topography on nanoindentation-induced plasticity.
- To establish new standards for evaluating incipient plasticity in crystals.
Main Methods:
- Catalyst-referred etching (CARE) was employed to achieve monoatomic step-terrace GaN surfaces.
- Nanoindentation was performed on surfaces with varying degrees of atomic ordering.
- Equivalent-radius contact analysis was used to decouple topographic effects from plasticity.
Main Results:
- CARE-treated surfaces exhibited pop-ins at ideal strength (16.15 GPa) with minimal stress scatter (2.3%).
- As-received and mechanically buffed surfaces showed reduced reproducibility and heterogeneous dislocation nucleation.
- Atomic step-terrace structure was identified as a key factor, not just surface roughness, for plasticity initiation.
Conclusions:
- Controlled atomic-scale surface topography is essential for reliable nanoindentation studies of crystal plasticity.
- CARE provides a method to prepare surfaces for fundamental studies of material behavior at the nanoscale.
- This work redefines nanoindentation evaluation standards towards atomic structure.


