Detective Quantum Efficiency-Based Comparison of HRTEM and Ptychography Phase Imaging

Felix Bennemann1, Angus I Kirkland1,2, David A Muller3

  • 1Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK.

Summary

Electron ptychography offers a more fluence-efficient imaging technique for beam-sensitive materials compared to traditional high-resolution transmission electron microscopy (HRTEM). This method provides better robustness to partial coherence, enhancing imaging performance.