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Minho Jin1,2, Hojun Kim3, Sejin Lee1,4

  • 1Department of Mechanical Engineering and Materials Science, Washington University in St. Louis, St. Louis, MO, 63130, USA.

Nano Convergence
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Summary

No abstract available in PubMed .

Keywords:
2D electronicsAtomic layer depositionGate dielectricHigh-κ dielectricsvan der Waals integration

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