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Fabrication of Silica Ultra High Quality Factor Microresonators

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150 Gbaud high-efficiency O-band silicon microring modulator.

Zhiyuan Zhou, Zhihan Sun, Huajie Wan

|May 4, 2026

Summary

Researchers developed a novel silicon microring modulator using an L-shaped PN junction. This design significantly boosts modulation efficiency for optical communications, achieving high-speed data transmission.

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Area of Science:

Photonics and Optoelectronics
Materials Science
Electrical Engineering

Background:

Silicon microring modulators are crucial for high-speed optical communication systems.
Existing designs face limitations in modulation efficiency and operational bandwidth.
Optimizing electro-optic overlap is key to enhancing modulator performance.

Purpose of the Study:

To demonstrate a high-efficiency O-band silicon microring modulator.
To investigate the performance benefits of an L-shaped PN junction design.
To achieve enhanced modulation efficiency and high-speed data transmission capabilities.

Main Methods:

Fabrication of an O-band silicon microring modulator featuring an L-shaped PN junction.
Optimization of the PN junction geometry for improved electro-optic overlap.
Characterization using static measurements (extinction ratio, Q-factor) and high-speed transmission experiments.

Main Results:

Achieved a modulation efficiency of 51 pm/V, a twofold enhancement over conventional designs.
Obtained a low Vπ·L of 0.42 V·cm, an extinction ratio of 18 dB, and a Q-factor of 2500.
Demonstrated 150 Gbaud NRZ signal operation with a bit error rate below the FEC threshold, leveraging optical peaking for >102 GHz bandwidth.

Conclusions:

The L-shaped PN junction design offers superior modulation efficiency for silicon microring modulators.
This advancement enables high-speed optical data transmission at 150 Gbaud.
The developed modulator is a promising component for next-generation optical communication networks.