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Updated: May 5, 2026

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Experiments on Ultrasonic Lubrication Using a Piezoelectrically-assisted Tribometer and Optical Profilometer
Published on: September 28, 2015
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Advances in Linear Ultrasonic Motors
Zhiling Liu1, Qiufeng Yan2,3, Qingyu Liu4
1Graduate School of Education, Joongbu University, Goyang 10279, Republic of Korea.
Micromachines
|May 4, 2026
Summary
Linear ultrasonic motors (LUSMs) offer high-precision actuation. Standing wave LUSMs outperform traveling wave types in speed and force, driving advancements in various fields.
Area of Science:
- Mechatronics
- Robotics
- Actuation Systems
Background:
- Linear ultrasonic motors (LUSMs) are crucial for high-precision actuation.
- They offer advantages like simple structure, high control accuracy, and direct linear motion.
Purpose of the Study:
- To classify LUSMs based on wave modes (traveling vs. standing waves).
- To elaborate on working principles, structural characteristics, and performance parameters.
- To summarize applications and outline future development trends.
Main Methods:
- Classification of LUSMs into traveling wave (TWLUSMs) and standing wave (SWLUSMs) types.
- Detailed explanation of working principles for both TWLUSMs and SWLUSMs.
- Comparative analysis of structural characteristics and performance parameters.
Main Results:
- TWLUSMs are categorized into straight and annular beam types.
- SWLUSMs are classified into single-foot and multi-foot types.
- SWLUSMs demonstrate superior output speed and force compared to TWLUSMs.
Conclusions:
- LUSMs are vital in biomedicine, deep-sea exploration, aerospace, and precision manufacturing.
- Future trends include miniaturization, lightweighting, extreme environment adaptability, and intelligent upgrades.
- This review serves as a comprehensive reference for LUSM design, performance, and application expansion.
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