High-Precision Salt Concentration Detection Using a CMUT Array with Temperature Compensation

This paper presents a miniaturized and highly accurate saltwater concentration monitoring system based on Capacitive Micromachined Ultrasonic Transducer (CMUT) array technology. The system incorporates a highly integrated CMUT array with a compact footprint of 5 mm × 5 mm, capable of both transmitting and receiving ultrasonic signals, which significantly contributes to the system's miniaturization and portability. To ensure accurate compensation for temperature-dependent variations in sound velocity, a TA610A temperature sensor is integrated for continuous real-time monitoring of the salt solution temperature. By acquiring ultrasonic echo signals, the system calculates the time-of-flight (TOF) of the acoustic waves. Based on the TOF and real-time temperature data, the sound velocity is determined, and the salt concentration is subsequently derived with temperature compensation applied to enhance measurement accuracy. Experimental results show a measurement precision of 0.1% and a maximum absolute error of 0.02%, confirming the system's high accuracy and robustness. Combining stability, reliability, and a compact real-time sensing design, the proposed CMUT-based system holds significant promise for practical deployment in various industrial and environmental monitoring scenarios.