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UV-LIGA Microfabrication for 1.1 THz Staggered Double-Grating Slow-Wave Structures.

Qi Jiang1, Xinghui Li1, Yuanfei Hui1

  • 1National Key Laboratory of Science and Technology on Vacuum Electronics, Beijing Vacuum Electronics Research Institute, Beijing 100015, China.

Micromachines
|May 4, 2026
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Summary

This study fabricated a 1.1 THz staggered double-grating slow-wave structure (SWS) for traveling wave tubes (TWTs) using UV-LIGA. Fabrication achieved high dimensional accuracy, with minor deviations negligibly impacting dispersion but affecting coupling impedance and operating voltage.

Keywords:
UV-LIGAmicro-electro-mechanical system (MEMS)slow-wave structure (SWS)staggered double-grating

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Area of Science:

  • Terahertz (THz) technology
  • Microwave engineering
  • Materials science

Background:

  • Traveling wave tubes (TWTs) require precise slow-wave structures (SWS) for operation.
  • Fabrication challenges limit the performance and scalability of THz SWS.

Purpose of the Study:

  • To fabricate a 1.1 THz staggered double-grating SWS for TWTs using UV-LIGA.
  • To evaluate the dimensional accuracy and uniformity of the fabricated SWS.
  • To assess the impact of dimensional deviations on the SWS electromagnetic performance.

Main Methods:

  • UV-LIGA process involving lithography, electroforming, grinding, polishing, and resist removal.
  • Metrological analysis of surface roughness, sidewall verticality, and dimensional accuracy.
  • Electromagnetic simulations to analyze dispersion characteristics and coupling impedance.

Main Results:

  • Achieved SWS with high structural uniformity and dimensional accuracies of ±2 μm (height) and ±1 μm (width).
  • Measured surface roughness as low as 17 nm (sidewall) and sidewall verticality of 90.1° ± 0.5°.
  • Dimensional deviations showed negligible impact on dispersion but reduced coupling impedance by 21% (linewidth) and increased synchronous voltage by 600 V (height).

Conclusions:

  • UV-LIGA is a viable method for fabricating high-precision 1.1 THz SWS for TWTs.
  • The study quantifies the relationship between dimensional deviations and electromagnetic performance.
  • Findings provide insights for optimizing SWS fabrication for improved TWT performance.