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Underwater Acoustic Target Detection Using a Miniaturized MEMS Hydrophone Array.

Xiao Chen1, Ying Zhang2

  • 1Information Science and Technology College, Dalian Maritime University, Dalian 116026, China.

Micromachines
|May 4, 2026
PubMed
Summary

This study introduces a compact Micro-electromechanical Systems (MEMS) hydrophone array for underwater target detection. It employs differential beamforming and phase self-correction to enhance accuracy, overcoming limitations of conventional sonar systems.

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Area of Science:

  • Acoustic Engineering
  • Sensor Technology
  • Signal Processing

Background:

  • Conventional sonar systems face challenges with sensor consistency, high costs, and large apertures for low-frequency detection.
  • These limitations restrict the deployment of effective sonar on small, mobile underwater platforms.
  • There is a need for compact, high-performance sensing solutions for underwater target detection.

Purpose of the Study:

  • To present a miniaturized Micro-electromechanical Systems (MEMS) hydrophone array for improved underwater target detection.
  • To address phase mismatch issues in multi-channel acquisition systems.
  • To overcome aperture limitations in miniaturized arrays using advanced beamforming techniques.

Main Methods:

  • Development of a six-element miniaturized MEMS hydrophone array (0.25 m spacing, 22 mm element diameter).
Keywords:
MEMS acoustic pressure hydrophonedifferential beamformingminiaturized hydrophone arrayphase errortarget detection

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  • Implementation of a phase self-correction method using interleaved Analog-to-Digital Converter (ADC) acquisition control for synchronous multi-channel sampling.
  • Adoption of a differential beamforming (DBF) algorithm to overcome aperture limitations and achieve frequency-invariant beam patterns.

    • Main Results:

    • The MEMS hydrophone exhibits sensitivity of -177.2 ± 1.5 dB and noise resolution of approximately 59.5 dB (re: 1 µPa/√Hz).
    • Phase self-correction effectively eliminates system-level phase errors, improving algorithm performance.
    • Differential beamforming (DBF) demonstrated superior target detection accuracy compared to conventional beamforming (CBF) in sea trials.

    Conclusions:

    • The proposed miniaturized MEMS hydrophone array offers a compact and high-performance solution for underwater target detection.
    • The combination of phase self-correction and differential beamforming significantly enhances detection accuracy, particularly for miniaturized arrays.
    • This technology addresses key limitations of conventional sonar, enabling broader applications on mobile underwater platforms.