Design and Fabrication of High-Frequency Resonant Micro-Accelerometer Based on Piezoelectric Stiffening Effect

In this work, a novel approach for implementing a resonant micro-accelerometer is demonstrated that may extend the operating frequency of such devices to several tens of MHz, which may enable direct wireless signal transfer. The proposed resonant accelerometer consists of a hybrid structure: a piezoelectric micro-resonator and a capacitive mass-spring (CMS) system (that are mechanically separated but electrically interconnected). The sensor utilizes the piezoelectric stiffening mechanism, which translates the acceleration-induced displacement of the capacitive mass-spring (CMS) structure into a shift in the resonance frequency of the interconnected resonator. The operating principle is elaborated upon in detail, supported by simulation and experimental results. Additionally, a novel fabrication technique is presented to realize a suspended fixed bi-layer electrode for the CMS in which a hardened layer of photoresist is utilized as a sacrificial layer. The experimental sensitivity of a fully functional device is reported to be ~6 Hz/g at 25 MHz (~0.23 ppm/g), which closely matches the simulated sensitivity of ~7 Hz/g (~0.278 ppm/g) for the fabricated capacitive gap of ~7 µm.