Theoretical Analysis and Structural Optimization of Overload-Protected MEMS Hydrophones

Area of Science:

• * Acoustic sensing and underwater technology.
• * Microelectromechanical systems (MEMS) engineering.
• * Materials science and structural mechanics.

Background:

• * MEMS hydrophones are vital for maritime security and underwater data collection.
• * Their delicate membrane structures are vulnerable to hydrostatic pressure, requiring overload protection.
• * Existing designs often lack sufficient robustness against extreme pressure conditions.

Purpose of the Study:

• * To develop and optimize an overload-protection design for MEMS hydrophone columns.
• * To ensure the structural integrity of MEMS hydrophones under hydrostatic pressure.
• * To balance protection requirements with fabrication constraints and operational sensitivity.

Main Methods:

• * Application of buckling stability theory for column design.
• * Integration of theoretical analysis, finite-element simulation, and process feasibility studies.
• * Collaborative optimization considering geometric design, anti-adhesion, sensitivity, and micro/nano-fabrication.

Main Results:

• * An optimized design scheme for hydrophone overload-protection columns was established.
• * Intermediate slenderness columns with radii of 5.5–7.5 μm were identified as optimal.
• * The design effectively provides overload protection while meeting fabrication and operational needs.

Conclusions:

• * The proposed design ensures MEMS hydrophone membrane integrity under hydrostatic pressure.
• * Optimized columns prevent buckling up to a depth of 382 meters.
• * The study provides a viable solution for enhancing the durability of MEMS hydrophones.