High-Yield ReS₂ Photodetector Array Enabled by Dry-Released Self-Rolled-Up Microtubes and Enhanced through Scalable...

Area of Science:

• Materials Science
• Nanotechnology
• Optoelectronics

Background:

• Three-dimensional (3D) self-rolled-up microarchitectures offer enhanced optoelectronic device performance.
• Fabricating high-quality, high-yield, and scalable 3D microarchitectures remains a significant challenge.

Purpose of the Study:

• To demonstrate a high-yield fabrication method for 3D ReS2 microtubes for photodetector arrays.
• To investigate the performance enhancement of these 3D structures through material integration.

Main Methods:

• Fabrication of 3D ReS2 self-rolled-up microtubes using XeF2 dry release on silicon on insulator.
• Integration of Molybdenum disulfide (MoS2) quantum dots (QDs) onto the ReS2 microtubes.
• Characterization of photodetector performance, including photocurrent, responsivity, and response time.

Main Results:

• Achieved a high-yield (∼98%) 16 × 21 array of 3D ReS2 microtubes.
• 3D configuration increased photocurrent by 2 orders of magnitude compared to planar devices.
• MoS2 QD integration resulted in >3-fold photocurrent and >2-fold responsivity improvements.
• Devices exhibited fast response times (4 ms/6 ms) and excellent stability.

Conclusions:

• XeF2 dry release is advantageous for large-scale, high-yield 3D microtube fabrication.
• The synergistic combination of 3D geometry, 2D materials, and 0D QDs enhances photodetector performance.
• This work provides a design strategy for next-generation photodetectors via structural and material engineering.