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Related Experiment Video

Updated: May 8, 2026

Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy
07:20

Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy

Published on: April 21, 2022

Foundry-Enabled Patterning of Diamond Quantum Microchiplets for Scalable Quantum Photonics.

Jawaher Almutlaq1,2,3, Alessandro Buzzi1, Anders Khaykin4

  • 1Research Laboratory of Electronics, Massachusetts Institute of Technology, 50 Vassar St, Cambridge, Massachusetts 02139, United States.

Nano Letters
|May 7, 2026
PubMed
Summary

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Researchers developed a new method for manufacturing diamond quantum devices. This scalable approach uses silicon masks and microtransfer printing, enabling mass production of quantum microchiplets for practical quantum technologies.

Area of Science:

  • Quantum photonics
  • Materials science
  • Nanofabrication

Background:

  • Diamond defects are promising for quantum information storage and secure communication.
  • Conventional diamond device fabrication is slow and difficult to scale for industrial production.
  • A scalable manufacturing method is needed to advance diamond quantum photonics.

Purpose of the Study:

  • To develop a scalable and industrially viable manufacturing approach for diamond quantum photonics.
  • To improve the uniformity, yield, and throughput of diamond optical structure fabrication.
  • To demonstrate the performance and integration capabilities of diamond quantum microchiplets.

Main Methods:

  • Fabrication of high-precision silicon masks in commercial foundries.
Keywords:
Diamond quantum photonicsFoundry-compatible fabricationHeterogeneous integrationQuantum microchiplets

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Last Updated: May 8, 2026

Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy
07:20

Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy

Published on: April 21, 2022

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source
12:19

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

Published on: April 4, 2017

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Nanofabrication of Gate-defined GaAs/AlGaAs Lateral Quantum Dots

Published on: November 1, 2013

  • Application of microtransfer printing to transfer masks onto diamond substrates.
  • Demonstration of large arrays of nanoscale optical structures on diamond.
  • Characterization of quantum microchiplets and their coupling to quantum emitters.
  • Main Results:

    • Successful creation of hundreds of diamond quantum microchiplets using the new method.
    • Enhanced optical performance and controlled coupling to quantum emitters demonstrated.
    • Improved uniformity, yield, and throughput compared to conventional methods.
    • Demonstration of a scalable path toward practical quantum technologies.

    Conclusions:

    • The microtransfer printing approach offers a scalable solution for industrial production of diamond quantum devices.
    • Diamond quantum microchiplets fabricated with this method show enhanced performance and integration potential.
    • This manufacturing advancement moves diamond quantum photonics closer to practical applications in secure communication and computing.