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Updated: May 9, 2026

Bulk and Thin Film Synthesis of Compositionally Variant Entropy-stabilized Oxides
Published on: May 29, 2018
Defect engineering for enhanced stability and spontaneous polarization in rhombohedral HfO2: First-principles
Guliqinayi Alimu1, Feifan Bian1, Chunlan Ma1,2
1Jiangsu Key Laboratory of Intelligent Optoelectronic Devices and Chips, School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China.
Defect engineering in rhombohedral Hafnium Dioxide (R3-HfO2) is crucial for enhancing ferroelectric polarization. Controlling intrinsic point defects optimizes stability and polarization for memory and logic devices.
Area of Science:
- Materials Science
- Solid State Physics
- Computational Materials Science
Background:
- Rhombohedral R3-HfO2 exhibits significant ferroelectric polarization (41 μC/cm2), making it promising for memory and logic devices.
- The stability and ferroelectric properties of R3-HfO2 are highly susceptible to intrinsic point defects.
Purpose of the Study:
- To investigate the impact of intrinsic point defects on the stability and ferroelectric polarization of R3-HfO2.
- To explore defect engineering strategies for enhancing R3-HfO2 properties through first-principles calculations.
Main Methods:
- First-principles calculations were employed to simulate defect formation and analyze their effects.
- The study examined defect behavior under varying Hf and O stoichiometry (Hf-poor, O-poor, Hf-rich, O-rich conditions).
Main Results:
- High concentrations of point defects form under Hf-poor or O-poor conditions; moderate Hf-rich and O-rich conditions are optimal for defect suppression.
- On-diagonal defects preserve R3 symmetry and ferroelectricity, while off-diagonal defects induce paraelectricity.
- Oxygen vacancies (VO) act as dominant donors, while interstitial oxygen (Oi) and hafnium vacancies (VHf) act as dominant acceptors.
Conclusions:
- Defect engineering is critical for fabricating high-quality, stable R3-HfO2 thin films with enhanced ferroelectric polarization.
- Interstitial oxygen (Oi) increases polarization by 24.4%, whereas hafnium vacancies (VHf) decrease it by 66.5%, highlighting selective defect control benefits.
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