Suspended Germanium-on-Silicon Photonic Integrated Circuits Operating in the Long-Wave Infrared and Their Use for...

Germanium-based integrated photonics is gaining attention due to its potential for mid-infrared wavelength applications, including environmental sensing, industrial gas monitoring, defense, and security. However, current germanium-on-silicon platforms face significant propagation losses at wavelengths above 8 μm, and gas sensing in this regime using a germanium waveguide has not been demonstrated to date. To address this challenge, we introduce a suspended germanium-on-silicon platform, where an 11 μm deep suspension gap ensures optical mode isolation from the lossy silicon substrate. The waveguide has a low propagation loss of 3.5 dB/cm at a wavelength of 9.2 μm. Furthermore, we demonstrate on-chip ethanol gas sensing in the long-wave infrared range with a detection limit of 925 ppm using this platform. Our method paves the way for extending the operating wavelength range of germanium-on-silicon integrated photonics into the long-wave infrared.