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Updated: May 13, 2026

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Experiments on Ultrasonic Lubrication Using a Piezoelectrically-assisted Tribometer and Optical Profilometer
Published on: September 28, 2015
Universal In Situ Flowrate Monitoring for Piezoelectric Microfluidics via Triboelectric Self-Sensing
Zhaojie Zhang1,2, Lang Feng1, Boyu Shen1,3
1Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, P. R. China.
Advanced Materials (Deerfield Beach, Fla.)
|May 12, 2026
Summary
A new triboelectric sensing method enables universal in situ flowrate monitoring for piezoelectric micropumps, overcoming limitations of conventional techniques. This innovation enhances real-time monitoring and accuracy for microfluidic devices.
Area of Science:
- Microfluidics
- Sensors and Actuators
- Biomedical Engineering
Background:
- Conventional flowrate monitoring for piezoelectric micropumps faces challenges with integration, contamination, and lab dependency.
- Existing methods limit the potential of microfluidic devices and advanced drug delivery systems.
Purpose of the Study:
- To develop a universal in situ flowrate monitoring method for piezoelectric micropumps using triboelectric sensing.
- To overcome the limitations of conventional flowrate monitoring techniques.
Main Methods:
- Integrated a triboelectric sensor within the piezoelectric micropump cavity.
- Utilized triboelectric signals to detect piezoelectric vibrator deformation for real-time flowrate monitoring.
- Validated the method across three distinct micropump architectures using voltage amplitude and frequency pulse techniques.
Main Results:
- Achieved remarkable universality across different micropump designs with linear fitting coefficients > 0.99.
- Demonstrated average monitoring errors below 2.49% for the developed flowrate monitoring methods.
- Developed a microcomputer-controlled system for drug injection applications with flowrates up to 2.2 mL/min and 2.298% monitoring accuracy.
Conclusions:
- The triboelectric sensing method provides a universal and highly accurate solution for in situ flowrate monitoring in piezoelectric micropumps.
- This technology establishes a new paradigm for fully integrated microfluidic devices.
- Paves the way for intelligent drug delivery systems with enhanced monitoring capabilities.
Keywords:
drug deliverymicrofluidic integration systempiezoelectric actuationtriboelectric sensinguniversal in situ flowrate monitoring
