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Published on: June 3, 2015
Carbon-Nanotube-Enabled Low-Threshold Laser Lift-Off for Ultra-Thin Polyimide Films.
Junwei Fu1,2, Yachong Xu1,2, Run Bai1,2
1School of Artificial Intelligence Science and Technology, University of Shanghai for Science and Technology, Shanghai 200093, China.
Nanomaterials (Basel, Switzerland)
|May 12, 2026
Summary
Carbon nanotubes (CNTs) lower the laser energy needed to separate thin polyimide films in flexible electronics. This CNT-assisted laser lift-off (LLO) method reduces damage and improves film separation quality.
Area of Science:
- Materials Science
- Nanotechnology
- Electronics Engineering
Background:
- Laser lift-off (LLO) is crucial for flexible electronics manufacturing.
- Conventional LLO methods using high laser energy can damage ultra-thin polyimide (PI) films.
Purpose of the Study:
- To develop a low-threshold LLO method for ultra-thin PI films.
- To investigate the role of carbon nanotubes (CNTs) in improving LLO efficiency and quality.
Main Methods:
- Finite element simulations and experimental validation using a 355 nm ultraviolet nanosecond laser.
- Integration of CNTs at the interface between a 500 nm PI film and a glass substrate.
Main Results:
- CNTs enhanced UV absorption and lateral heat diffusion, reducing the LLO threshold from 180 mJ/cm² to 120 mJ/cm².
- CNT integration led to smoother blisters with larger diameters and reduced heights.
- Minimized thermal and mechanical damage to the PI film and devices.
Conclusions:
- CNT-assisted LLO offers an efficient, low-damage solution for ultra-thin film separation.
- This method has significant potential for advancing high-performance flexible electronics.
