Development of a 16-channel solid-state nanopore array platform for integrated nanopore fabrication and ionic current...

Parallel solid-state nanopore measurements are expected to improve not only throughput but also molecular discrimination performance. Here, we report the development of a 16-channel solid-state nanopore array measurement system that enables parallel nanopore fabrication by dielectric breakdown and subsequent ionic current recording. The system supports two fabrication modes: pulsed-voltage-induced dielectric breakdown (MPVI) and controlled dielectric breakdown (CBD) under constant-voltage bias, allowing nanopore formation over a wide diameter range. To demonstrate the operation of the developed system, two experimental studies were conducted. In the first study, nanopores were fabricated in 5 nm-thick SiN membranes using MPVI, followed by detection of single-stranded DNA (ssDNA) translocation. Arrays of nanopores with diameters ranging from 1 to 2 nm were formed, and the pore-diameter dependence of dwell time and current blockade amplitude during ssDNA translocation could be evaluated at sub-nanometer resolution. In the second study, nanopores were fabricated in 14 nm-thick SiN membranes using CBD, and double-stranded DNA (dsDNA) translocation was detected. Analysis of current traces during CBD suggested that pore enlargement remained limited for a period after dielectric breakdown, followed by accelerated pore growth accompanied by a rapid increase in current. The resulting pore diameters were distributed within 8-10 nm for 13 of the 16 channels and within 8-9 nm for 12 channels, demonstrating tight size control across most channels. Using these fabricated nanopores, dsDNA translocation events were observed in all channels.