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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

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Strategic active-brake energy dissipation for transformer-coupled ultrasonic motors: Step-size minimization and

Qichong Ma1, Song Pan1, Jianing Xu1

  • 1Nanjing University of Aeronautics and Astronautics, China.

Ultrasonics
|May 15, 2026
PubMed
Abstract

Keywords:
Piezoelectric actuatorPiezoelectric ceramicPosition controlStepping controlUltrasonic motor

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