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On Determination Method for Resolution of Secondary Electron Images in Scanning Electron Microscopy

Tongfang Yang1, Yanbo Zou2, Zejun Ding1

  • 1Hefei National Research Center for Physical Sciences at the Microscale and Department of Physics, University of Science and Technology of China, Hefei, Anhui, P. R. China.

Advanced Science (Weinheim, Baden-Wurttemberg, Germany)
|May 25, 2026
PubMed

Keywords:
Monte CarloRayleigh criterionRose criterionresolutionscanning electron microscopysharpness

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