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Three-phase ScAlN-based PMUT-driven acoustic streaming micropump.

Chen Wu^1,2, Grim Keulemans³, Benjamin Jones³

¹Electrical Engineering Department (ESAT), Katholieke Universiteit Leuven (KU Leuven), B-3001, Leuven, Belgium. chen.wu2@imec.be.

Microsystems & Nanoengineering

|May 26, 2026

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This study demonstrates a Scandium-doped Aluminum Nitride (ScAlN)-based piezoelectric micromachined ultrasonic transducer (PMUT) array for micro-pumping. The ScAlN PMUT array generates directional acoustic streaming for precise fluid handling in microfluidic systems.

Area of Science:

Microfluidics and Nanotechnology
Acoustofluidics
Materials Science

Background:

Scandium-doped aluminum nitride (ScAlN) piezoelectric micromachined ultrasonic transducer (PMUT) arrays are gaining traction in acoustofluidics for micro total analysis systems (μTAS).
While effective for bioparticle manipulation via acoustic radiation force, their application in fluid handling through acoustic streaming is less explored.
This research addresses the underexplored potential of ScAlN PMUTs for generating directional acoustic streaming for micro-pumping.

Purpose of the Study:

To investigate the feasibility of using a rectangular membrane ScAlN-based PMUT array for directional acoustic streaming-based micro-pumping.
To demonstrate fluid handling capabilities in a polydimethylsiloxane (PDMS) microfluidic channel.
To compare the performance and advantages of the proposed ScAlN PMUT micropump with existing chip-integrable micropumps.

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Main Methods:

Fabrication and integration of a rectangular membrane ScAlN PMUT array into a PDMS microfluidic channel.
Driving the PMUT array with AC signals featuring a 120° phase difference between adjacent cells to induce directional acoustic streaming.
Utilizing numerical multiphysics simulations to predict and optimize flow rates.

Main Results:

The ScAlN PMUT array successfully generated directional acoustic streaming for micro-pumping applications.
The fabricated device achieved a volumetric flow rate of 0.12 μL/min, consistent with simulation predictions.
Numerical optimization indicated potential flow rates of up to 1.0 μL/min through adjustments in array kerf and phase differences.

Conclusions:

The ScAlN PMUT array presents a novel and effective approach for micro-pumping using directional acoustic streaming.
The proposed micropump offers advantages such as a compact footprint, CMOS compatibility, and straightforward on-chip integration.
This technology is a promising candidate for μTAS applications requiring precise, low-flow-rate fluid control in miniaturized systems.