Compact adaptive spectral imager enabled by MEMS Fabry-Perot filtering chip in longwave infrared

Kui Zhou1,2, Xiaodong Wang1,2, Geng Tong1,2

  • 1School of Mechanical Engineering, Ningbo Institute of Northwestern Polytechnical University, Key Laboratory of Micro/Nano Systems for Aerospace (Ministry of Education), Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi'an, China.

Abstract