Flexible Surface Acoustic Wave (SAW) Magnetic Sensor Based on Terfenol-D Grating-Arrayed Thin Polymer Film

Surface Acoustic Wave (SAW) magnetic sensors are traditionally fabricated on rigid substrates, which severely limits their application on curved or irregular surfaces. To address this critical limitation, this paper presents a novel flexible SAW magnetic sensor based on a grating-arrayed Terfenol-D thin film deposited on a 50 µm thick flexible lithium niobate (LiNbO₃) substrate. Unlike conventional designs using a continuous magnetostrictive layer, the proposed grating-arrayed structure is designed to aid in hysteresis compensation and minimize measurement errors associated with residual magnetization. As demonstrated experimentally, the sensors achieve a high sensitivity of 85.8 kHz/mT for devices with λ-wide gratings and a maximum frequency shift of 377 kHz at 5 mT. A systematic investigation reveals that sensitivity is critically dependent on the grating width and film thickness, with 500 nm thick gratings yielding optimal performance. Crucially, the sensor's functionality under mechanical deformation is validated, and a differential measurement method is introduced to effectively compensate for stress-induced frequency shifts, ensuring reliable operation in practical, non-ideal conditions. The results confirm the sensor's robust performance under the tested stress conditions, positioning this flexible SAW magnetic sensor as a promising solution for advanced, conformable sensing applications.