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Updated: May 28, 2026
15:25
Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
A Double-Layer Parallel MEMS Inductor with Enhanced Current-Carrying Capacity and Thermal Stability
Xingyu Pi1, Jiao Li1, Hongyu Chen1
1School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China.
Micromachines
|May 27, 2026
Summary
This study introduces a novel double-layer parallel (DLP) array microcoil inductor chip. The DLP design significantly enhances energy storage and current capacity for miniaturized electronic circuits.
Area of Science:
- Electrical Engineering
- Materials Science
- Microelectronics
Background:
- Inductor size is critical for electronic circuit miniaturization and thin-film integration.
- Existing miniaturized inductors struggle with low current capacity and inductance, hindering advanced applications.
Purpose of the Study:
- To design and verify a novel inductor chip with improved performance for integrated power modules.
- To address the limitations of current miniaturized inductors in terms of energy storage and current handling.
Main Methods:
- Development of a double-layer parallel (DLP) array microcoil structure.
- Experimental verification of the DLP inductor's thermal and electromagnetic performance.
Main Results:
- The DLP inductor demonstrates superior rated energy storage per unit area compared to single-layer designs.
- The 4 × 3 DLP array achieved a maximum DC current capacity of 4.25 A.
- Excellent thermal performance was observed for the DLP inductor.
Conclusions:
- The DLP array microcoil structure offers a significant advancement for integrated inductor technology.
- This innovation provides a valuable reference for thermal-electromagnetic co-design in highly reliable integrated power modules.
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