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Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
Published on: December 5, 2015
Youyuan Yue1,2, Liming Che1,2, Cancan Li1,2
1Institute of Future Lighting, College of Intelligent Robotics and Advanced Manufacturing, Fudan University, Shanghai 200433, China.
This study introduces a novel multilayer insulated metal substrate (MIMS) power module design to reduce stray inductance in wide band gap (WBG) semiconductors. The MIMS design significantly lowers inductance and improves thermal performance for high-power electronics.
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