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Published on: June 1, 2012
Simulations of Novel Semi-Spherical Electrode Detectors Formed by Simultaneously Deep-Etched Trenches.
Hongfei Wang1,2,3, Zheng Li2,3
1School of Physics and Physical Engineering, Qufu Normal University, Qufu 273165, China.
Micromachines
|May 27, 2026
Summary
A novel 3D detector featuring a semi-spherical electrode was designed and simulated. Its small capacitance makes it ideal for X-ray applications in photon sciences.
Area of Science:
- Semiconductor device physics
- Radiation detection technology
Background:
- Traditional detectors face limitations in sensitivity and performance.
- Advancements in 3D detector structures are crucial for next-generation scientific instruments.
Purpose of the Study:
- To propose and investigate a novel 3D detector with a unique semi-spherical electrode structure.
- To analyze the electrical properties and post-irradiation performance of the proposed detector design.
Main Methods:
- Conceptualization, design, and 3D modeling of the semi-spherical electrode detector.
- Electrical simulations using a technology computer-aided design (TCAD) tool.
- Analysis of electric potential, electric field, electron concentration, depletion voltage, leakage current, and capacitance.
Main Results:
- The semi-spherical electrode structure was successfully designed and modeled.
- Electrical properties were simulated, revealing favorable characteristics for photon science applications.
- Post-irradiation performance was analyzed, confirming detector viability.
Conclusions:
- The novel 3D detector with a semi-spherical electrode exhibits promising performance.
- Its small capacitance is particularly advantageous for X-ray detection in photon sciences.
- The proposed design offers a potential advancement in radiation detector technology.
