Investigations of CrN/TiO₂ Coatings Obtained in the Hybrid PVD/ALD Process on 316L Steel Substrates

Chromium nitride (CrN) can be used as a coating material deposited via physical vapour deposition (PVD), thereby improving the corrosion and wear resistance of the substrate. However, this level of corrosion protection may not be sufficient in an aggressive corrosion environment. The coatings often contain intrinsic microstructural defects, such as microcraters, which can serve as pathways for the corrosive medium to reach the substrate, thereby initiating and promoting corrosion. In this study, the influence of parameters on the formation of a TiO₂ layer using the ALD technique was investigated. In particular, the work focused on assessing the effectiveness of the TiO₂ layer as a sealing barrier for CrN coatings (PVD) applied to austenitic 316L steel. The TiO₂ ALD coatings were produced at a constant temperature of 200 °C with a varying number of cycles, ranging from 200 to 1000 cycles. Structural investigations were carried out using scanning electron microscopy SEM and atomic force microscopy. Electrochemical properties were investigated using a potentiodynamic test and electrochemical impedance spectroscopy (EIS) in a 3.5% NaCl solution. SEM observations indicate that the morphology of the hybrid coatings is strongly influenced by the number of ALD cycles. The TiO₂ layer conformally reproduces the underlying PVD topography while progressively sealing the coating by filling intrinsic defects and discontinuities. Hybrid coatings (PVD/ALD) with titanium oxide deposited at 500 ALD cycles were found to have the best corrosion resistance. The polarisation resistance for these coatings was nearly four times higher than that of both the single PVD (CrN) coating and the uncoated stainless steel 316L substrate. At the same time, the corrosion current density was several times lower than that of the reference systems. The corrosion mechanisms were investigated by observing the surfaces of the samples after corrosion testing using SEM. Abrasion resistance tests using the pin-on-disc method and adhesion tests (scratch tests) were also performed, which showed that appropriate optimisation of the layer architecture in the PVD/ALD hybrid system significantly improves its tribological durability, interlayer stability, and adhesion to the substrate.