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Updated: May 28, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Likang Wang1, Chenyu Dong1,2,3, Yufan Jin1
1College of Engineering and Applied Sciences, Nanjing University, Nanjing 210023, China.
We developed a low-cost, modular microscope combining optical and atomic force microscopy (AFM) using an optical pickup unit (OPU). This integrated system achieves stable imaging with real-time probe visualization and low noise.
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