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Optimal Series Resistors for On-Wafer Calibrations
Jasper A Drisko1, Richard A Chamberlin1, James C Booth1
1National Institute of Standards and Technology, Boulder, CO 80305 USA.
IEEE Transactions on Microwave Theory and Techniques
|June 1, 2026
Summary
This study optimized series resistors for on-wafer calibration and transmission line analysis. Near 100 Ω, resistors excel in calibration, while 150 Ω and shorter designs minimize uncertainty in capacitance extraction.
Area of Science:
- Electrical Engineering
- Materials Science
Background:
- Series resistors are crucial for on-wafer calibration and characterizing coplanar waveguide transmission lines.
- Previous research focused on applications, not the optimal design of the series resistor itself.
Purpose of the Study:
- To investigate the impact of dc resistance and geometry on series resistor performance.
- To determine the optimal series resistor design for on-wafer calibration and capacitance extraction.
Main Methods:
- Fabrication of 48 series resistors with varying dc resistances (1 Ω to 6 kΩ).
- Evaluation of resistor utility in series-resistor calibration against multiline thru-reflect-line (TRL).
- Assessment of capacitance per unit length extraction for coplanar waveguide transmission lines.
Main Results:
- A dc resistance near 100 Ω yielded the best performance for series-resistor calibration.
- Resistors with dc resistance near 150 Ω and lengths under 20 μm provided the lowest uncertainty in capacitance extraction.
- Guidance on selecting appropriate frequency bounds for capacitance estimation was provided.
Conclusions:
- The optimal series resistor design is dependent on the specific application (calibration vs. capacitance extraction).
- Resistor geometry and dc resistance are critical parameters for on-wafer measurements.
- Findings aid engineers in selecting optimal series resistors for improved on-wafer calibration and transmission line analysis.
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