Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Ice-phase optothermal tweezers.

Nature communications·2026
Same author

Water doping sodium battery electrolyte controls nanostructure, interactions, and electrochemical properties.

Science advances·2026
Same author

Freeform optical flow based on meta-conveyors for compact, programmable in situ nanomanipulation.

Nature communications·2026
Same author

Investigating the contributions of electrostatic and capillary effects in anti-dust nanostructures.

Nanotechnology·2026
Same author

High-Q multimodal guided-surface lattice resonances in index-discontinuous environments.

Nature communications·2026
Same author

A Critical Evaluation of Concentration Proxies in SIMS Diffusion Studies.

Analytical chemistry·2026
Same journal

Polarization-State-Dependent Charge Screening in Metal-Ferroelectric-Metal Memcapacitors Enabled by an IGZO Oxygen Reservoir Layer.

ACS applied materials & interfaces·2026
Same journal

Enabling Closed-Loop Recycling of Carbon Fiber-Reinforced Composites: A Dynamic Network Strategy Based on Cardanol-Derived Amines and Lignin-Derived Carbonates.

ACS applied materials & interfaces·2026
Same journal

Unconventional Phase Shift in Spin Hall Magnetoresistance of Antiferromagnetic Insulators.

ACS applied materials & interfaces·2026
Same journal

The Evolving Landscape of Terahertz Biosensing: From Sensitivity to Precision.

ACS applied materials & interfaces·2026
Same journal

π-π Stacking Enhanced Generation of Reactive Species in Donor-Acceptor Heterojunctions for High-Efficiency Photocatalytic Degradation of Endocrine-Disrupting Compounds under Solar Light.

ACS applied materials & interfaces·2026
Same journal

Interfacial Engineering of Frustrated Lewis Pairs for Promoting Cellulose-to-Sorbitol Cascade Conversion.

ACS applied materials & interfaces·2026
See all related articles

Related Experiment Video

Updated: Jun 3, 2026

Patterning via Optical Saturable Transitions - Fabrication and Characterization
08:19

Patterning via Optical Saturable Transitions - Fabrication and Characterization

Published on: December 11, 2014

Optothermal Bubble Etch Lithography.

Anand Swain1, Kent Nguyen1, Moein Nouri2

  • 1Texas Materials Institute, The University of Texas at Austin, Austin, Texas 78712, United States.

ACS Applied Materials & Interfaces
|June 1, 2026
PubMed
Summary
This summary is machine-generated.

Optothermal Bubble Etch Lithography (OBEL) is a novel, eco-friendly method for high-resolution patterning. This maskless technique uses lasers and microbubbles for precise fabrication, offering a sustainable alternative for advanced manufacturing.

Keywords:
etchinglithographymarangoni convectionmasklessmicrobubbles

More Related Videos

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
10:18

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Published on: January 27, 2017

Rendering SiO2/Si Surfaces Omniphobic by Carving Gas-Entrapping Microtextures Comprising Reentrant and Doubly Reentrant Cavities or Pillars
08:02

Rendering SiO2/Si Surfaces Omniphobic by Carving Gas-Entrapping Microtextures Comprising Reentrant and Doubly Reentrant Cavities or Pillars

Published on: February 11, 2020

Related Experiment Videos

Last Updated: Jun 3, 2026

Patterning via Optical Saturable Transitions - Fabrication and Characterization
08:19

Patterning via Optical Saturable Transitions - Fabrication and Characterization

Published on: December 11, 2014

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
10:18

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Published on: January 27, 2017

Rendering SiO2/Si Surfaces Omniphobic by Carving Gas-Entrapping Microtextures Comprising Reentrant and Doubly Reentrant Cavities or Pillars
08:02

Rendering SiO2/Si Surfaces Omniphobic by Carving Gas-Entrapping Microtextures Comprising Reentrant and Doubly Reentrant Cavities or Pillars

Published on: February 11, 2020

Area of Science:

  • Materials Science
  • Nanotechnology
  • Chemical Engineering

Background:

  • Subtractive nanomanufacturing is critical for high-precision devices.
  • Conventional methods are resource-intensive and use hazardous materials.

Purpose of the Study:

  • Introduce Optothermal Bubble Etch Lithography (OBEL) as a sustainable alternative.
  • Enable localized, high-resolution patterning with minimal damage.

Main Methods:

  • Utilize a low-power laser to generate microbubbles at the substrate-liquid interface.
  • Employ solutal Marangoni convection for debris removal.
  • Achieve spatially selective etching via concentrated etchant ions.

Main Results:

  • Demonstrate a single-step, maskless lithography technique.
  • Achieve submicron (∼450 nm) resolution with complex planar patterns.
  • Operate at ultralow etchant concentrations (0.05 M).

Conclusions:

  • OBEL is an environmentally friendly, cost-effective lithography method.
  • Offers a scalable solution for micro- and nanoscale fabrication.
  • Applicable to electronics, photonics, and biomedical fields.