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Updated: Jun 3, 2026

Using Laser Scanning Microscopy to Determine Electromigration in Molybdenum Disilicide
Published on: May 23, 2025
Abstract:
In this Letter, a line-scan phase measuring deflectometry (LSPMD) method for online three-dimensional (3D) shape reconstruction of specular surfaces is proposed for the first time, to the best of our knowledge. Differing from conventional PMD systems, LSPMD exploits a line-scan camera and a high-frame-rate sinusoidal fringe display screen to realize an ultrafast fringe acquisition rate and sufficient resolution. Furthermore, based on the novel hardware architecture and acquisition logic, a flexible and robust system calibration method for LSPMD using a geometrically defined surface is specifically proposed, which enables high-precision 3D reconstruction without camera calibration and additional auxiliary patterns. The experimental results illustrate that LSPMD simultaneously achieves an ultra-high acquisition rate of 10 kHz and a high pixel resolution of 8132 pixels.

