MEMS electrochemical angular accelerometer: a paradigm shift for attitude detection and control in rotorcraft UAVs
Maoqi Zhu1,2, Qinghua Liu1,2, Honghao Zhang1,2
1State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, 100190, China.
Microsystems & Nanoengineering
|June 4, 2026
Summary
This study introduces a novel MEMS-based electrochemical angular accelerometer (EAA) for unmanned aerial vehicles (UAVs). The EAA provides direct, high-fidelity angular acceleration measurement, improving UAV attitude control accuracy and stability.
Area of Science:
- * Aerospace Engineering
- * Mechanical Engineering
- * Sensor Technology
Background:
- * Accurate attitude estimation in Unmanned Aerial Vehicles (UAVs) is crucial for dynamic control.
- * Conventional methods using gyroscope signal differentiation suffer from phase lags and noise amplification, impacting flight stability.
- * There is a need for direct, high-fidelity angular acceleration measurement to overcome these limitations.
Purpose of the Study:
- * To propose and develop a high-performance MEMS-based electrochemical angular accelerometer (EAA).
- * To enable direct and low-latency measurement of angular acceleration for improved UAV attitude control.
- * To validate the performance of the EAA through theoretical modeling, fabrication, and flight testing.
Main Methods:
- * Theoretical modeling and finite element optimization were used to design a compact plate-type electrode structure.
- * A Glass-on-Silicon (GOS) package was employed for the Micro-Electro-Mechanical Systems (MEMS) device.
- * Performance was evaluated using open-loop turntable tests and closed-loop flight tests with an Incremental Nonlinear Dynamic Inversion (INDI) controller.
Main Results:
- * The fabricated EAA achieved a sensitivity of 4.5 V/(rad/s²) and a noise floor of 3.12 × 10⁻⁶ (rad/s²)/√Hz.
- * Ultra-low power consumption of 2.4 mW was recorded.
- * Flight tests demonstrated faster command responsiveness and reduced tracking errors compared to gyroscope-derived estimates, with a compensated bandwidth up to 10 Hz.
Conclusions:
- * The developed EAA offers a direct sensing paradigm for high-fidelity angular acceleration measurement.
- * This technology significantly enhances the dynamic control and attitude estimation accuracy of UAVs.
- * The EAA addresses the limitations of conventional methods, paving the way for more stable and responsive flight control systems.
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