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Updated: Jun 11, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Optical Fourier Surfaces for Integrated Photonics.

Daniel Petter¹, Fabian Kaufmann², Daniel Chelladurai³

¹Department of Mechanical and Process Engineering, ETH Zurich, 8092 Zurich, Switzerland.

|June 9, 2026

Summary

This summary is machine-generated.

Grayscale fabrication of optical Fourier surfaces (OFSs) enables advanced integrated photonics. This method allows for more efficient and compact devices on silicon and lithium niobate platforms.

Keywords:

Bragg filter high-Q cavity integrated photonics second harmonic generation thermal scanning-probe lithography thin-film lithium niobate

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Last Updated: Jun 11, 2026

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High-Throughput Total Internal Reflection Fluorescence and Direct Stochastic Optical Reconstruction Microscopy Using a Photonic Chip

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Published on: November 16, 2019

Area of Science:

Photonics and Optical Engineering
Materials Science
Nanotechnology

Background:

Integrated photonics relies on miniaturized optical elements.
Traditional lithography limits optical elements to binary height profiles.
Grayscale fabrication offers enhanced control and efficiency.

Purpose of the Study:

To demonstrate photonic integrated circuits using grayscale optical Fourier surfaces (OFSs).
To explore the capabilities of wavy height profiles in silicon-on-insulator and thin-film lithium niobate.
To create efficient and compact optical devices with advanced functionalities.

Main Methods:

Utilizing grayscale fabrication techniques, specifically thermal scanning-probe lithography and dry etching.
Designing and implementing intuitive schemes for OFS elements.
Fabricating devices on silicon-on-insulator and thin-film lithium niobate platforms.

Main Results:

Demonstrated sinusoidal Bragg reflectors in silicon waveguides with up to 44 dB extinction ratio.
Fabricated high-quality factor cavities (1.6 × 10^5) in lithium niobate waveguides.
Achieved second harmonic generation in lithium niobate utilizing high-Q cavities and nonlinear properties.

Conclusions:

Grayscale OFS fabrication is a high-fidelity method for advanced integrated photonic devices.
This technique enables the creation of efficient, compact devices with tailored optical responses.
The demonstrated devices showcase potential for next-generation quantum and classical optical technologies.