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Characterization of topographic lateral resolution in coherence scanning interferometry based on a virtual instrument
Applied Optics
|June 10, 2026
Summary
This study introduces a virtual instrument method to assess coherence scanning interferometry
Area of Science:
- Metrology
- Optical Engineering
- Surface Science
Background:
- Coherence scanning interferometry (CSI) is crucial for measuring surface microstructures and roughness.
- Accurate characterization of topographic lateral resolution is vital for CSI data fidelity.
- Limitations in lateral resolution can affect the accuracy of measured surface topography.
Purpose of the Study:
- To develop and validate a virtual-instrument-based approach for evaluating the spatial frequency response (SFR) of CSI systems.
- To quantitatively characterize the topographic lateral resolution of CSI instruments.
- To assess the impact of defocus on CSI's SFR and lateral resolution.
Main Methods:
- Utilized the instrument's 3D transfer function, derived from microsphere measurements, to build a virtual CSI model.
- Employed the virtual CSI model for spatial frequency response (SFR) calibration.
- Applied the virtual-instrument method to a commercial CSI system under varying defocus conditions.
- Measured reference sinusoidal gratings to validate the virtual-instrument-based SFR calibration.
Main Results:
- The virtual-instrument approach successfully evaluated CSI's spatial frequency response (SFR).
- The method provided quantitative characterization of topographic lateral resolution.
- Defocus conditions were shown to influence the SFR characteristics of the CSI system.
- Results from virtual-instrument calibration closely matched measurements from reference gratings.
Conclusions:
- The virtual-instrument-based method offers a reliable way to characterize CSI's topographic lateral resolution.
- This approach enables accurate assessment of CSI system performance and limitations.
- Understanding SFR through this method improves the fidelity of surface microstructure and roughness measurements.
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