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Grating parameter characterization based on the combination of dark field geometry-guidance and model-assisted

Jiale Zhang, Qun Yuan, Xiaoxin Fan

|June 11, 2026

Summary

This study introduces a new method for precise grating characterization using coherence scanning interferometry (CSI). The technique improves accuracy in measuring grating period and height, even under resolution limitations.

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Area of Science:

Metrology
Optical Engineering
Surface Science

Background:

Accurate grating characterization is crucial in metrology.
Coherence Scanning Interferometry (CSI) faces limitations in measuring small grating periods and heights due to resolution and edge effects.
Existing CSI methods struggle with interferometric signal superposition caused by grating edges.

Purpose of the Study:

To develop a novel method for accurate grating characterization under resolution-limited conditions.
To overcome the limitations of conventional CSI in determining spatial period and height.
To enhance grating metrology without requiring hardware modifications.

Main Methods:

Combines dark field geometry guidance with model-assisted interferometric processing.
Utilizes dark field imaging for enhanced subpixel grating-edge localization.
Employs Fourier-domain analysis with a Fourier-optics-based signal model to eliminate signal superposition.
Reconstructs surface topography using a standard envelope-based CSI algorithm.

Main Results:

Achieved < ±2% error in grating period estimation via simulation.
Successfully eliminated redundant interferometric components near step edges.
Reduced signed relative height error from 5.6% to 0.3% for a 2 µm period grating.
Demonstrated improved grating period determination and height measurement accuracy.

Conclusions:

The proposed method effectively enhances grating characterization accuracy under resolution-limited conditions.
Dark field geometry guidance and model-assisted processing are key to overcoming CSI limitations.
The technique offers a robust solution for precise metrology of gratings and step heights.