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Updated: Jun 13, 2026

The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
Published on: May 24, 2020
Formation Mechanism and Dielectric Properties of Ultra-High-Voltage Anodic Al Foils Investigated by ReaxFF-MD and DFT
Xuliang Chu1, Yucheng Ji1, Chenyang Yao1
1National Materials Corrosion and Protection Data Center, Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China.
Abstract:
Understanding the atomic-scale formation of anodic oxide films is critical for Al electrolytic capacitors. The formation mechanism and dielectric properties of an ultra-high-voltage anodized Al foil were investigated by combining experiments, reactive molecular dynamics, and first-principles calculations. Results indicate that film growth is primarily governed by the (011) crystal plane, and the density of the oxide film increases with the applied electric field. The diffusion barrier of H atoms (0.54 eV) is significantly lower than that of O atoms (1.41 eV), suggesting the preferential formation of Al hydroxide oxide species on the surface. As the anodization voltage increases, the oxide undergoes phase evolution from AlOOH to γ-Al2O3 and finally to α-Al2O3. First-principles calculations reveal the dielectric constants of alumina, which are 7.96 for AlOOH, 21.80 for γ-Al2O3 (Paglia structure), and 10.24 for α-Al2O3. These findings provide a theoretical basis for optimizing the microstructure and dielectric performance of ultra-high-voltage anodized Al foils.

