Tailorable 2D MoS2 via Oxide Sulfidation for Photodetection and Contact Engineering

Chieh-Yu Kuan1, Sheng-Po Chang2, Shoou-Jinn Chang1

  • 1Department of Electrical Engineering, Institute of Microelectronics, National Cheng Kung University, Tainan City 70101, Taiwan.

Summary

This study developed a scalable oxide-to-sulfide conversion method for high-quality few-layer molybdenum disulfide (MoS2) films. This approach enhances MoS2 device performance for optoelectronics by improving contact properties and enabling tunable layer-dependent behavior.

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