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Layer-Dependent Oxidation Spreading in Multilayer Graphene during AFM Local Anodic Oxidation
Jan Vymazal1,2, Martin Konecny1,2, Jakub Piastek1,2
1Central European Institute of Technology - Brno University of Technology (CEITEC BUT), Purkyňova 123, 612 00 Brno, Czech Republic.
ACS Omega
|June 15, 2026
Summary
This study explores how multilayer graphene
Area of Science:
- Materials Science
- Nanotechnology
- Surface Chemistry
Background:
- Local anodic oxidation is a key technique for creating graphene oxide nanostructures.
- Oxidation spreading from a stationary tip on graphene remains understudied.
- Previous research focused on monolayer graphene, necessitating studies on multilayer systems.
Purpose of the Study:
- To investigate the effect of graphene layer number on oxidation spreading patterns.
- To characterize the different nanostructure types formed.
- To develop a theoretical model for pattern formation.
Main Methods:
- Utilized atomic force microscopy (AFM) for local anodic oxidation and topography.
- Employed Kelvin probe force microscopy and Raman spectroscopy for property characterization.
- Performed electric field calculations using COMSOL Multiphysics for theoretical modeling.
Main Results:
- Identified three distinct pattern categories: graphene craters (2-8 layers), isotropic etching (8-14 layers), and anisotropic etching (>28 layers).
- Observed pattern radius increases with relative humidity, independent of exposure time.
- Correlated pattern formation with oxidation initiated at graphene defects and cleavages.
Conclusions:
- The number of graphene layers significantly influences anodic oxidation spreading patterns.
- Relative humidity plays a crucial role in determining pattern size.
- A combined experimental and simulation model explains the observed phenomena based on defect-initiated oxidation.

