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Published on: January 27, 2017
3D-nanoprinted vertical coupler using hybrid lithography for optical redistribution applications.
Optics Letters
|June 15, 2026
Summary
We developed a polymeric vertical coupler using hybrid-lithography for optical redistribution. This cost-effective device integrates high-performance vertical interconnects into 3D photonic systems, enhancing optical device manufacturing.
Area of Science:
- Photonics and Optical Engineering
- Materials Science and Engineering
- Microfabrication Technologies
Background:
- Optical redistribution is crucial for advanced 3D photonic systems.
- Traditional vertical couplers often require complex metallization or air cavities.
- Developing integrated, high-performance optical interconnects remains a significant challenge.
Purpose of the Study:
- To demonstrate a novel polymeric vertical coupler for optical redistribution applications.
- To develop a scalable and cost-effective fabrication method for vertical couplers.
- To achieve high coupling efficiency in an all-solid total internal reflection (TIR) mirror design.
Main Methods:
- Hybrid-lithography combining ultraviolet (UV) lithography and two-photon polymerization (TPP).
- Fabrication of a planar optical redistribution layer (ORDL) using UV lithography.
- Creation of vertical coupling micromirrors via TPP for an all-solid TIR mirror.
Main Results:
- Achieved an all-solid TIR mirror by leveraging high refractive-index contrast, eliminating metallization.
- Theoretical coupling efficiencies of 89.4% (unsupported) and 81.6% (supported).
- Experimental coupling loss of approximately 3.3 dB at 1310 nm telecommunication wavelength.
Conclusions:
- The hybrid-lithography approach offers a scalable and cost-effective method for vertical coupler fabrication.
- The all-solid TIR mirror design simplifies integration into 3D photonic systems.
- This technology enables high-performance vertical interconnects for advanced optical systems.

