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Quantitative estimation of deep-subwavelength scale via dark-field scattering axial energy concentration decay
Abstract:
Interferometric scattering microscopy offers high sensitivity for nanoscale detection, but its quantitative capability remains constrained by multiple factors. Here, a quantitative framework is proposed for sparse-scatterer inspection scenarios using a dark-field interferometric configuration to suppress substrate-related background. Rather than relying on detailed interferometric patterns, the method extracts quantitative information from the axial redistribution of optical energy during propagation. Numerical simulations within this framework reveal a monotonic dependence of the characteristic axial-energy features on the diameter of subwavelength scatterers. Furthermore, experimental measurements under 532 nm illumination and statistical analysis show that the full width at half maximum of the axial energy concentration provides a strong size dependence for isolated nanoparticles in the 5-50 nm range, with group-level correlation (R2= 0.99985, RMSE = 0.0495) and nonparametric significance (p= 0.0396).
