Electron-induced ionisation of the C₂F₆ molecule

Area of Science:

• Atomic and Molecular Physics
• Plasma Science
• Materials Science

Background:

• Electron-induced ionization is crucial for understanding plasma chemistry and material interactions.
• Accurate cross-section data for molecules like C₂F₆ (hexafluoroethane) are essential for modeling these processes.
• Existing data for C₂F₆ ionization may be incomplete, particularly regarding differential cross-sections.

Purpose of the Study:

• To evaluate electron-induced ionization cross-sections and rate coefficients for C₂F₆.
• To calculate single and double differential cross-sections (DDCS) for C₂F₆ for the first time.
• To generate 3D profiles of DDCS to visualize angular and energy distributions of secondary electrons.

Main Methods:

• Utilized the Jain-Khare semi-empirical approach for total ionization cross-section evaluation.
• Calculated single differential cross-sections at incident electron energies of 100 and 200 eV.
• Computed double differential cross-sections (DDCS) at 100 and 200 eV, with fixed scattering angles of 30° and 60°.

Main Results:

• The Jain-Khare method yielded total ionization cross-sections in good agreement with available theoretical and experimental data.
• Single differential cross-sections were calculated for C₂F₆ for the first time.
• DDCS were computed for the first time, and their 3D profiles were generated, offering detailed insights into electron scattering dynamics.

Conclusions:

• The Jain-Khare approach provides reliable total ionization cross-sections for C₂F₆.
• The novel calculations of single and double differential cross-sections significantly expand the available data for C₂F₆.
• The 3D DDCS profiles offer a comprehensive visualization of electron scattering, valuable for plasma and materials science applications.