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Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique
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Impact of boundary conditions and geometric tolerances dynamics on MEMS double touch mode capacitance pressure sensor

Shabana S1, Sumit Kumar Jindal2

  • 1School of Electronics Engineering, Vellore Institute of Technology, Vellore, Tamil Nadu, India.

Scientific Reports
|June 22, 2026
PubMed

Keywords:
Capacitive sensingGeometric optimizationM-shaped diaphragm designMEMS pressure sensorMultiphysics simulation

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