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Published on: August 15, 2014
Nonlinear Modeling and Differential-Voltage Control of an Electrostatic MEMS Micromirror for Miniaturized Laser
Xuan Wang1,2, Chen Wang1,2, Meilin Xie1,2
1Key Laboratory of Space Precision Measurement Technology, Chinese Academy of Sciences, Xi'an 710119, China.
Micromachines
|June 26, 2026
Summary
This study presents a nonlinear model and differential-voltage control for electrostatic MEMS micromirrors, significantly improving pointing accuracy in laser communication terminals by addressing nonlinearities and errors.
Area of Science:
- Optoelectronics
- Microelectromechanical Systems (MEMS)
- Optical Engineering
Background:
- Electrostatic MEMS micromirrors offer compact, low-power beam steering for laser communication.
- Nonlinearities and installation errors degrade pointing accuracy in quasi-static applications.
Purpose of the Study:
- Investigate nonlinear modeling and differential-voltage control for two-axis electrostatic MEMS micromirrors.
- Enhance pointing accuracy in miniaturized laser communication terminals.
Main Methods:
- Characterized a 5.0 mm aperture bonded aluminum MEMS micromirror.
- Developed a nonlinear voltage-angle model using measured deflection data.
- Implemented a terminal-level calibration with a quadrant detector.
Main Results:
- Achieved maximum deflection angles of 5.215° (X-axis) and 5.161° (Y-axis).
- Cubic nonlinear model reduced RMS fitting error from 0.142° to 0.0127° (X-axis) and 0.132° to 0.0109° (Y-axis).
Conclusions:
- The nonlinear model and differential-voltage control significantly improve MEMS micromirror pointing accuracy.
- The approach provides a foundation for precise beam pointing and closed-loop acquisition in laser communication terminals.
