Reliability Assessment of MEMS Gyroscopes via Dual-Mechanism Synergistic Degradation: A Generalized Linear Model with...

As the core sensor of inertial measurement units, the reliability of Micro-Electro-Mechanical Systems (MEMS) gyroscopes is critical for long-term navigation and motion control applications. To bridge the mechanism-data gap in MEMS multi-mechanism degradation modeling, this paper proposes a physics-informed dual-indicator reliability assessment framework based on Wiener processes. Two degradation indicators under consideration are frequency-related degradation caused by stiffness degradation and Q-factor degradation caused by damping degradation, for which corresponding physics-embedded stochastic degradation models are formulated. The two indicators are normalized and fused through a generalized weighted limit state function, where failure is defined as gyroscope-level performance failure. Closed-form reliability expressions are derived for linear limit states, while Monte Carlo simulation is used for nonlinear cases. Reduced-order multiphysics simulation cases, including a double-ended fixed beam and a cantilevered MEMS mass block, are used to demonstrate the mechanism-to-indicator-to-reliability modeling procedure. The results show that the proposed dual-indicator framework provides more balanced reliability assessment than single-indicator analysis under the simulation setting. The proposed method offers an alternative mechanism-informed approach for reliability analysis and lifetime prediction of other MEMS devices.