Zeptojoule calorimetry

The measurement of energy is a fundamental tool used in quantum technology and computing. Some of the most sensitive energy detectors-bolometers and calorimeters-are thermal, meaning that they operate by absorbing incoming energy, converting it into heat and reading out the resulting temperature change electrically using a thermometer. Recently, superconductor-normal-conductor-superconductor radiation sensors with metallic and graphene absorbers haven been predicted to be capable of full-width at half-maximum energy resolutions of 0.75 zJ and 0.05 zJ, respectively. However, these estimates are only mathematically extracted from steady-state noise and responsivity measurements. Here we show that a metallic superconductor-normal-conductor-superconductor sensor can be used for zeptojoule calorimetry. With the approach, we measure the energy of 1-μs-long 8.4-GHz microwave pulses with a full-width at half-maximum energy resolution finer than 0.95 ± 0.02 zJ (=5.9 ± 0.12 meV) corresponding to 170 photons at 8.4 GHz. The technique provides a potential path to real-time calorimetric detection of single photons in the 10-GHz range.