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Related Experiment Video

Updated: Jul 3, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

STARE: a semiconductor-integrated transmit-array architecture for 6G beamforming.

Jinhyun Kim¹, Byeongjin Kim¹, Minkyu Park¹

¹Department of Electrical and Computer Engineering (ECE) and Institute of New Media and Communications (INMC), Seoul National University, Seoul, Republic of Korea.

Nature Communications

|July 1, 2026

Summary

This summary is machine-generated.

This study introduces STARE, the first semiconductor-foundry-manufacturable reconfigurable intelligent surface (RIS). This scalable, low-power technology enables efficient beam steering for future wireless systems.

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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

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Published on: February 4, 2018

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Last Updated: Jul 3, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

Area of Science:

Electrical Engineering
Materials Science
Wireless Communications

Background:

Reconfigurable intelligent surfaces (RIS) are crucial for 6G wireless networks.
Existing RIS technologies face limitations in speed, signal loss, and manufacturing cost.

Purpose of the Study:

To develop the first RIS system manufactured using a standard semiconductor process.
To address limitations of current RIS implementations for improved 6G performance.

Main Methods:

Developed the STARE (Semiconductor Transmit Array with Reconfigurable Elements) architecture.
Integrated custom Selective Overlap Diodes (SODs) into high-resistivity silicon.
Utilized a vialess unit cell with magnetic coupling to eliminate through-silicon vias.

Main Results:

Achieved tunable ON resistance and OFF capacitance with low power consumption.
Demonstrated 180° phase control and beam steering from -45° to +45° at 15.5 GHz.
Verified semiconductor-foundry manufacturability of the RIS system.

Conclusions:

STARE represents the first semiconductor-foundry-manufacturable RIS, bridging device fabrication and system beamforming.
Offers a scalable, energy-efficient, and cost-effective solution for future wireless systems.
Enables practical implementation of RIS technology in 6G and beyond.